Sol-gel process was adopted to prepare BiFeO3 films . BiFeO3 films were deposited on LaNiO3 coated Si(100) substrates annealed at 500 and 550 ℃, respectively . The X-ray diffraction results reveal that BiFeO3 film has a rhombohedrally distorted perovskite structure with space group R3c . The film annealed at 500 ℃ has larger remnant polarization (Pr) of 35 .3 μC/cm2 . For the film annealed at 550 ℃, smaller remnant polarization of P4=4 .8μC/cm2 is observed for its low breakdown electric field . Lower leakage conduction is observed in the film annealed at 500 ℃ at low applied field .
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