Optimization of Sputtering Parameters for the Deposition of Low Resistivity Indium Tin Oxide Thin Films

金属学报(英文版), 2014, 27(2): 324-330. doi: 10.1007/s40195-014-0048-0

^1, , ^2, , ^3, , ^4, , ^5,

1.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

2.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

3.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

4.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

5.Department of Medical Physics and Biomedical Engineering,Faculty of Medicine, Shahid Beheshti University of Medical Sciences, Tehran, Iran

Optimization of Sputtering Parameters for the Deposition of Low Resistivity Indium Tin Oxide Thin Films

Navid Yasrebi ^1, , Behrang Bagheri ^2, , Payam Yazdanfar ^3, , Bizhan Rashidian ^4, , Pezhman Sasanpour ^5,

1.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

2.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

3.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

4.Department of Electrical Engineering, Sharif University of Technology, Azadi Avenue, PO.Box 11155-9363, Tehran, Iran

5.Department of Medical Physics and Biomedical Engineering,Faculty of Medicine, Shahid Beheshti University of Medical Sciences, Tehran, Iran

Keywords： Indium tin oxide

参考文献

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[7]	V. Teixeira;H.N. Cui;L.J. Meng;E. Fortunato;R. Martins .Amorphous ITO thin films prepared by DC sputtering for electrochromic applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(12):70-75.
[8]	K. Vijayalakshmi;C. Ravidhas;V. Vasanthi Pillay;D. GopalaKrishna .Influence of deposition parameters and heat treatment on the NO_2 sensing properties of nanostructured indium tin oxide thin film[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2011(10):3378-3382.
[9]	M. Gulen;G. Yildirim;S. Bal;A. Varilci;I. Belenli;M. Oz .Role of annealing temperature on microstructural and electro-optical properties of ITO films produced by sputtering[J].Journal of Materials Science. Materials in Electronics,2013(2):467-474.

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