A novel simulation method is presented in this paper to evaluate the collection performance of monolithic active pixel sensor (MAPS) devices for minimum ionizing particle tracking.A simplified 3D matrix pixel structure is built using the computer aided design software Sentaurus.The virtual device is then divided into hundreds of parts and an independent customized X photon model is involved in each part to simulate the conditions under 55Fe radiation.After data processing and analysis,charge collection efficiency,collection time and diffusion conditions can be estimated in detail.In order to verify the reliability of the method,comparisons are made between the simulations and experiments.Although there are some defects,it can be concluded that the proposed idea is a feasible method for the evaluation of the MAPS collection performance.
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