With the springing up of the MEMS industry,research on accelerometers is focused on miniaturization,integration,high reliability,and high resolution,and shares extensive application prospects in military and civil fields.Comparing with the traditional single cantilever beam structure or “cantilever-mass” structure,the proposed structure of“8-beams/mass” with its varistor completely symmetric distribution in micro-silicon piezoresistive triaxial aceelerometer in this paper has a higher axial sensitivity and smaller cross-axis sensitivity.Adopting ANSYS,the process of structural analysis and the manufacturing flow of sensing unit are showed.In dynamic testing conditions,it can be concluded that the axial sensitivity of x,y,and z are Sx =48μV/g,Sy =54μV/g and Sz =217 μV/g respectively,and the nonlinearities are 0.4％,0.6％ and 0.4％.
参考文献
| [1] | Zhang Jianbi.MEMS-based micro-silicon piezoresistive accelerometer design.Electron Sci Technol,2009,22(10):40 |
| [2] | Yazdi N,Ayazi F,Najafi K.Micromachined inertial sensors.Proc IEEE,1998,86(8):1640 |
| [3] | Najafi K,Chac J,Kulah H,et al.Micromachined silicon accelerometers and gyroscopes.IEEE/RSJ International Conference on Intelligent Robots and Systems,2003,3:2353 |
| [4] | Wu Rui,Wen Tingdun.Silicon micro-acceleration sensor technologies.Instrument Technique and Sensor,2007,(3):8 |
| [5] | Dong Peitao,Li Xinxin,Zhang Kun,et al.Design,fabrication and characterization of a high-performance monolithic triaxial piezoresistive high-g accelerometer.Chinese Journal of Semiconductors,2007,28(9):1482 |
| [6] | Wang Yucai,Jiao Jiwei,Duan Fei,et al.Design and fabrication of an accelerometer with novel "8-beams/mass" structure.Chinese Journal of Semiconductors,2007,28(5):783 |
| [7] | Takao H,Matsumoto Y,Ishida M.A monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers.International Conference on Solid-State Sensor and Actuators,1997:1173 |
| [8] | Takao H,Fukumoto H,Ishida M.Fabrication of a three-axis accelerometer integrated with commercial 0.8μm-CMOS circuits.Proc IEEE 13th Annu Int Conf Micro Electro Mechanical Systems,2000:781 |
| [9] | Takao H,Fukumoto H,Ishida M.A CMOS integrated threeaxis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining.IEEE Trans Electron Devices,2001,48(9):1961 |
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