We prepared macro-porous silicon (MPS) by electrochemical corrosion in a double-tank cell on the surface of single-crystalline P-type silicon.Then,nano-WO3 films were deposited on MPS layers by DC facing target reactive magnetron sputtering.The morphologies of the MPS and WOs/MPS samples were investigated by using a field emission scanning electron microscope.The crystallization of WO3 and the valence of the W in the WO3/MPS sample were characterized by X-ray diffraction and X-ray photoelectron spectroscopy,respectively.The gas sensing properties of MPS and WO3/MPS gas sensors were thoroughly measured at room temperature.It can be concluded that:the WO3/MPS gas sensor shows the gas sensing properties of a P-type semiconductor gas sensor.The WO3/MPS gas sensor exhibits good recovery characteristics and repeatability to l ppm NO2.The addition of WO3 can enhance the sensitivity of MPS to NO2.The long-term stability ofa WO3/MPS gas sensor is better than that of an MPS gas sensor.The sensitivity of the WO3/MPS gas sensor to NO2 is higher than that to NH3 and C2H5OH.The selectivity of the MPS to NO2 is modified by deposited nano-WO3 film.
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