参考文献
[1] | Lei Yao-Hu;Liu Xin;Guo Jin-Chuan;Zhao Zhi-Gang;Niu Han-Ben.Development of x-ray scintillator functioning also as an analyser grating used in grating-based x-ray differential phase contrast imaging[J].中国物理B(英文版),2011(4):222-227. |
[2] | Peng Bobo;Wang Fei;Liu Tao;Yang Zhenya;Wang Lianwei;Ricky K.Y. Fu;Paul K. Chu.Novel method of separating macroporous arrays from p-type silicon substrate[J].半导体学报(英文版),2012(04):28-31. |
[3] | Margherita Bassu;Salvatore Surdo;Lucanos Marsilio Strambini;Giuseppe Barillaro.Electrochemical Micromachining as an Enabling Technology for Advanced Silicon Microstructuring[J].Advanced functional materials,20126(6):1222-1228. |
[4] | 雷耀虎;郭金川;赵志刚;牛憨笨.Si深刻蚀光助电化学方法的研究[J].半导体技术,2010(6):517-521. |
[5] | Wang Guozheng;Fu Shencheng;Chen Li;Wang Ji;Qin Xulei;Wang Yang;Zheng Zhongkui;Duanmu Qingduo.Influence of voltage on photo-electrochemical etching of n-type macroporous silicon arrays[J].半导体学报,2010(11):131-135. |
[6] | Wang Guozheng;Chen Li;Qin Xulei;Wang Ji;Wang Yang;Fu Shencheng;Duanmu Qingduo.Influence of etching current density on the morphology of macroporous silicon arrays by photo-electrochemical etching[J].半导体学报,2010(07):57-60. |
[7] | Lin JC;Lai CM;Jehng WD;Hsueh KL;Lee SL.Effect of ethanol on the photoelectrochemical fabrication of macroporous N-Si(100) in HF solution[J].Journal of the Electrochemical Society,20086(6):D436-D442. |
[8] | Zhao Zhigang;Guo Jinchuan;Lei Yaohu;Niu Hanben.Photoelectrochemical etching of uniform macropore array on full 5-inch silicon wafers[J].半导体学报,2010(07):156-160. |
[9] | Foll H.;Christophersen M.;Carstensen J.;Hasse G..Formation and application of porous silicon [Review][J].Materials Science & Engineering, R. Reports: A Review Journal,20024(4):93-141. |
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