半导体学报（英文版）, 2016, 37(2): 1-9. doi: 10.1088/1674-4926/37/2/021001

基金项目: Project supported by the National Natural Science Foundation of China (Nos.60936002, 61025021, 61434001, 61574083), the State Key Development Program for Basic Research of China (No.2015CB352100), the National Key Project of Science and Technology (No.2011ZX02403-002) and the Special Fund for Agroscientific Research in the Public Interest of China (No.201303107).

Surface acoustic wave devices for sensor applications

Keywords： surface acoustic wave

参考文献

[1]	Li, Chuan;Liu, Xingzhao;Shu, Lin;Li, Yanrong.AlN-based surface acoustic wave resonators for temperature sensing applications[J].Materials express: an international journal on multidisciplinary materials research,20154(4):367-370.
[2]	Borrero, G.A.;Bravo, J.P.;Mora, S.F.;Velásquez, S.;Segura-Quijano, F.E..Design and fabrication of SAW pressure, temperature and impedance sensors using novel multiphysics simulation models[J].Sensors and Actuators, A. Physical,2013:204-214.
[3]	Liu, Boquan;Han, Tao;Zhang, Chengrui.Error Correction Method for Passive and Wireless Resonant SAW Temperature Sensor[J].IEEE sensors journal,20156(6):3608-3614.
[4]	Guowei ZHANG;Wenkang SHI;Xiaojun JI;Tao HAN;Feng DU;Lianger LI.Temperature Characteristics of Surface Acoustic Waves Propagating on La3Ga5SiO4 Substrates[J].材料科学技术学报(英文版),2004(01):63-66.
[5]	Schimetta G.;Weigel R.;Dollinger F..A wireless pressure-measurement system using a SAW hybrid sensor[J].IEEE Transactions on Microwave Theory and Techniques,200012(12):2730-2735.
[6]	Rodríguez-Madrid, J.G.;Iriarte, G.F.;Williams, O.A.;Calle, F..High precision pressure sensors based on SAW devices in the GHz range[J].Sensors and Actuators, A. Physical,2013:364-369.
[7]	Tang, Yongliang;Li, Zhijie;Ma, Jinyi;Wang, Lu;Yang, Jin;Du, Bo;Yu, Qingkai;Zu, Xiaotao.Highly sensitive surface acoustic wave (SAW) humidity sensors based on sol-gel SiO2 films: Investigations on the sensing property and mechanism[J].Sensors and Actuators, B. Chemical,2015:283-291.
[8]	Haekwan Oh;Ki Jung Lee;Sang Sik Yang;Keekeun Lee.Development of novel dual-axis sensing gyroscope using surface acoustic wave[J].Microelectronic engineering,2012Sep.(Sep.):259-264.
[9]	Oh, H.;Wang, W.;Yang, S.;Lee, K..Development of SAW based gyroscope with high shock and thermal stability[J].Sensors and Actuators, A. Physical,20111(1):8-15.
[10]	Fu, Chen;Elmazria, Omar;Sarry, Frederic;Mahalingam, Thaiyan;Yang, Sang Sik;Lee, Keekeun.Development of wireless, batteryfree gyroscope based on one-port SAW delay line and double resonant antenna[J].Sensors and Actuators, A. Physical,2014:270-280.
[11]	Keekeun Lee;Wen Wang;Taehyun Kim;Sangsik Yang.A novel 440 MHz wireless SAW microsensor integrated with pressure-temperature sensors and ID tag[J].Journal of Micromechanics and Microengineering,20073(3):515-523.
[12]	Kang, A.;Zhang, C.;Ji, X.;Han, T.;Li, R.;Li, X..SAW-RFID enabled temperature sensor[J].Sensors and Actuators, A. Physical,2013:105-113.
[13]	Mateusz Pasternak.Overtone Oscillator for SAW Gas Detectors[J].IEEE sensors journal,20066(6):1497-1501.
[14]	Wieslaw P. Jakubik.Surface acoustic wave-based gas sensors[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,20113(3):986-993.
[15]	Guilherme N.M. Ferreira;Ana-Carina da-Silva;Brigitte Tome.Acoustic wave biosensors: physical models and biological applications of quartz crystal microbalance[J].Trends in biotechnology,200912(12):689-697.
[16]	Humberto Campanella;Jaume Esteve;Josep Montserrat;Arantxa Uranga;Gabriel Abadal;Nuria Barniol;Albert Romano-Rodriguez.Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators[J].Applied physics letters,20063(3):033507-1-033507-3-0.
[17]	Cai, Hua-Lin;Yang, Yi;Chen, Xiao;Ali Mohammad, Mohammad;Ye, Tian-Xiang;Guo, Cang-Ran;Yi, Li-Ting;Zhou, Chang-Jian;Liu, Jing;Ren, Tian-Ling.A third-order mode high frequency biosensor with atomic resolution[J].Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices,2015:261-268.
[18]	N.W. Emanetoglu;C. Gorla;Y. Liu;S. Liang;Y. Lu.Epitaxial ZnO Piezoelectric thin films for saw filters[J].Materials science in semiconductor processing,19993(3):247-252.
[19]	Bu G.;Ciplys D.;Shur A.;Schowalter LJ.;Schujman S.;Gaska R..Temperature coefficient of SAW frequency in single crystal bulk AIN[J].Electronics Letters,20039(9):755-757.
[20]	Aubert, T..Investigations on AlN/sapphire piezoelectric bilayer structure for high-temperature SAW applications[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,20125(5):999-1005.
[21]	Nakahata H.;Hachigo A.;Higaki K.;Fujii S.;Shikata S.;Fujimori N..Theoretical study on SAW characteristics of layered structuresincluding a diamond layer[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,19953(3):362-375.
[22]	V. Mortet;O. Elmazria;M. Nesladek.Study of aluminium nitride/freestanding diamond surface acoustic waves filters[J].Diamond and Related Materials,20033/7(3/7):723-727.
[23]	Zhou, C.;Yang, Y.;Cai, H.;Ren, T.-L..Temperature-Compensated High-Frequency Surface Acoustic Wave Device[J].IEEE Electron Device Letters,201312(12):1572-1574.
[24]	Luo, J.;Luo, P.;Xie, M.;Du, K.;Zhao, B.;Pan, F.;Fan, P.;Zeng, F.;Zhang, D.;Zheng, Z.;Liang, G..A new type of glucose biosensor based on surface acoustic wave resonator using Mn-doped ZnO multilayer structure[J].Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices,2013:512-518.
[25]	Lee YJ.;Roh YR.;Cho HM.;Kim HB..Development of a SAW gas sensor for monitoring SO2 gas[J].Sensors and Actuators, A. Physical,19982(2):173-178.
[26]	Olive H. Murphy;Mohammad Reza Bahmanyar;Alessandro Borghi;Christopher N. McLeod;Manoraj Navaratnarajah;Magdi H. Yacoub;Christofer Toumazou.Continuous in vivo blood pressure measurements using a fully implantable wireless SAW sensor[J].Biomedical microdevices,20135(5):737-749.
[27]	Tashtoush NM.;Eddy N.;Cheeke JDN..Surface acoustic wave humidity sensor based on a thin PolyXIO film[J].Sensors and Actuators, B. Chemical,19983(3):218-225.
[28]	Sheng, L.;Dajing, C.;Yuquan, C..A surface acoustic wave humidity sensor with high sensitivity based on electrospun MWCNT/Nafion nanofiber films[J].Nanotechnology,201126(26):265504-1-265504-7.
[29]	Penza M.;Anisimkin VI.;Milella E..Monitoring of NH3 gas by LB polypyrrole-based SAW sensor[J].Sensors and Actuators, B. Chemical,19981/3(1/3):218-224.
[30]	Qin SJ.;Tang ZY.;Song YL.;Zeng FZ.;Zhao D.;Wu ZJ..The sensitivity to SO2 of the SAW gas sensor with triethanolamine modified with boric acid[J].Sensors and Actuators, B. Chemical,20001/3(1/3):240-242.
[31]	Lim, C.;Wang, W.;Yang, S.;Lee, K..Development of SAW-based multi-gas sensor for simultaneous detection of CO_2 and NO_2[J].Sensors and Actuators, B. Chemical,20111(1):9-16.
[32]	Raj, V.B.;Singh, H.;Nimal, A.T.;Sharma, M.U.;Gupta, V..Oxide thin films (ZnO, TeO_2, SnO_2, and TiO _2) based surface acoustic wave (SAW) E-nose for the detection of chemical warfare agents[J].Sensors and Actuators, B. Chemical,2013:636-647.
[33]	Sehra G;Cole M;Gardner JW.Miniature taste sensing system based on dual SH-SAW sensor device: an electronic tongue[J].Sensors and Actuators, B. Chemical,20041/2(1/2):233-239.
[34]	Sangdae Lee;Ki-Bok Kim;Yong-Il Kim.Love Wave SAW Biosensors for Detection of Antigen-antibody Binding and Comparison with SPR Biosensor[J].Food science and biotechnology,20115(5):1413-1418.
[35]	Chen Fu;Inki Jung;Sang-sik Yang;Keekeun Lee.Towards optimised wireless Love wave biosensor with high sensitivity[J].Micro & nano letters,201212(12):1202-1205.
[36]	Kwan, J.K.;Sit, J.C..Acoustic wave liquid sensors enhanced with glancing angle-deposited thin films[J].Sensors and Actuators, B. Chemical,2013:715-719.
[37]	Martin F.;Newton MI.;McHale G.;Melzak KA.;Gizeli E..Pulse mode shear horizontal-surface acoustic wave (SH-SAW) system for liquid based sensing applications[J].Biosensors & Bioelectronics: The International Journal for the Professional Involved with Research, Technology and Applications of Biosensers and Related Devices,20046(6):627-632.
[38]	Zhonghui Li;Yolanda Jones;Jeanne Hossenlopp;Richard Cernosek;Fabien Josse.Analysis of Liquid-Phase Chemical Detection Using Guided Shear Horizontal-Surface Acoustic Wave Sensors[J].Analytical chemistry,200514(14):4595-4603.
[39]	Josse F;Bender F;Cernosek RW.Guided shear horizontal surface acoustic wave sensors for chemical and biochemical detection in liquids[J].Analytical chemistry,200124(24):5937-5944.
[40]	McDonald JC.;Anderson JR.;Chiu DT.;Wu HK.;Schueller OJA. Whitesides GM.;Duffy DC..Fabrication of microfluidic systems in poly(dimethylsiloxane) [Review][J].Electrophoresis: The Official Journal of the International Electrophoresis Society,20001(1):27-40.
[41]	AIN on silicon based surface acoustic wave resonators operating at 5 GHz[J].Electronics Letters,200923(23):1196.
[42]	Muller, A.;Neculoiu, D.;Konstantinidis, G.;Deligeorgis, G.;Dinescu, A.;Stavrinidis, A.;Cismaru, A.;Dragoman, M.;Stefanescu, A..SAW Devices Manufactured on GaN/Si for Frequencies Beyond 5 GHz[J].IEEE Electron Device Letters,201012(12):1398-1400.
[43]	Rodriguez-Madrid, J. G.;Iriarte, G. F.;Pedros, J.;Williams, O. A.;Brink, D.;Calle, F..Super-High-Frequency SAW Resonators on AlN/Diamond[J].IEEE Electron Device Letters,20124(4):495-497.
[44]	J.G. Rodriguez-Madrid;G.F. Iriarte;D. Araujo;M.P. Villar;O.A. Williams;W. Miiller-Sebert;F. Calle.Optimization of A1N thin layers on diamond substrates for high frequency SAW resonators[J].Materials Letters,20121(1):339-342.
[45]	Wen-Ching Shih;Mao-Jin Wang;I. Nan Lin.Characteristics of ZnO thin film surface acoustic wave devices fabricated using nanocrystalline diamond film on silicon substrates[J].Diamond and Related Materials,20083(3):390-395.

上一张下一张

计量

下载量()
访问量()

作者相关

在本站搜索
在百度学术搜索
在万方数据库搜索
在CNKI搜索

文章评分

您的评分：
1

0%
2

0%
3

0%
4

0%
5

0%

材料期刊网

Surface acoustic wave devices for sensor applications

参考文献