Nb3 Sn金属合金是一种性能优良的超导材料。磁控溅射多层沉积是用两个溅射源分层沉积铌和锡，再经过高温退火后获得超导薄膜的方法。用这种方法所获得的超导薄膜的原子组分的调整比较方便，对于Nb3Sn的研究较为有利。实验测量了样品的超导参数和晶格参数，其超导临界温度(Tc)可达17 K，剩余电阻率(RRR)为5左右。需要进一步研究相关工艺，以便提高RRR，从而使这种方法在超导加速腔的制造中得到应用。
Nb3Sn is a very good kind of superconducting material. We first sputtered the Nb and Sn with two magnetrons and deposited multilayer, and then obtained the superconducting thin film by annealing. By this method, it is convenience to change the stoichiometric ratio and to investigate the property of Nb3Sn. We measured the superconducting parameters of the thin film. The critical temperature is about 17 K and the residual resistance radio (RRR) is about 5. The method is needed to improve and increase the RRR, in order that the multilayer deposition can be used in the superconducting cavity fabrication.
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