采用磁控溅射方法分别掺杂含量约为10％(原子分数)的Cu,Ag,Ni金属,制备出三种TiB2基涂层.利用XRD,SEM分析涂层结构,并通过塑性指数δH、划痕和压痕三种手段对涂层韧性进行表征.结果表明:掺杂金属在涂层中的存在形式不同,导致对涂层晶粒和生长结构的影响不同,其中Ag以晶体形式存在,未发现Cu和Ni的晶相;三种涂层均存在TiB2晶相,Ni和Ag使TiB2晶粒细化,Cu促进晶粒长大;TiB2-Cu和TiB2-Ni涂层为柱状结构,表面存在明显颗粒,而TiB2-Ag涂层柱状结构趋于消失,表面无明显颗粒.结构的不同对涂层的力学性能有明显影响,所有涂层均保持在较高的硬度(＞35GPa),三种金属都对涂层韧性有所改善,其中Ni最为显著,Cu和Ag相对较差.
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