研究不同的掺锗浓度对硼掺杂P型多晶硅铸锭性能的影响.实验结果表明:掺锗能够影响多晶硅铸锭中的位错密度、间隙氧浓度和硅片的机械强度.当掺锗浓度低于5×1019 at·cm-3时,位错密度和间隙氧浓度随着掺锗浓度的增加而降低,机械强度则随着掺锗浓度的增加而增强.当铸锭中掺锗浓度为5×1019 at·cm-3时,与不掺锗的硅片相比,掺锗硅片中位错密度平均降低约3％,间隙氧浓度平均降低约6％,机械强度平均提高约20％.但是,当掺锗浓度高于1×1020 at·cm-3时,掺锗对多晶硅铸锭性能的改善效果变差了,并对其性能产生不利的影响.
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