将AZO原料粉末和AZO残靶研磨后的粉末混合,采用注浆成型和常压大气烧结工艺制备靶材,实验主要测试了相对密度、吸水率、线收缩率和电阻率等性能,并通过XRD和SEM表征AZO靶材的晶体形态和微观结构,与新靶材进行性能对比,研究残靶粉末回收利用对靶材性能的影响.残靶粉末的加入对AZO靶材有轻微影响,测试结果显示烧结温度1450℃、保温5h、AZO残靶加入量为10％时有较好的性能:相对密度高达99.24％,吸水率和收缩率分别为17.96％和15.70％,电阻率为2.12×10-3Q· cm.含有残靶的AZO靶材稍差的性能可能归结于AZO粉末和残靶粉末的兼容性.
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