近年来,氧化钨(WO3)基半导体气体传感器由于可用来检测低浓度二氧化氮、二氧化硫、臭氧和氨气等气体而受到广泛关注.将WO3基材料分为4类:纯WO3材料、氧化物-WO3复合材料、贵金属-WO3复合材料和有机物-WO3复合材料,总结近年来中外文献中WO3基材料对不同气体的响应性能,展现近年来国内外WO3基半导体气体传感器的研究进展.最后根据已有的工作进展,提出合成新型纳米材料、降低工作温度、提高传感器选择性应成为WO3基半导体气体传感器下一阶段的研究重点.
参考文献
[1] | 刘湘军;谭湘倩;浣石.金属氧化物气敏传感器[J].广州大学学报(自然科学版),2007(5):42-46. |
[2] | Barsan N.;Weimar U..Understanding the fundamental principles of metal oxide based gas sensors; the example of CO sensing with SnO2 sensors in the presence of humidity [Review][J].Journal of Physics. Condensed Matter,200320(20):R813-R839. |
[3] | 吴广明;傅亚翔;马建华;沈军.纳米多孔 WO3薄膜的溶胶-凝胶制备与热处理[J].同济大学学报(自然科学版),2002(3):370-374,378. |
[4] | 陈中威;强鹏飞;杨培华;麦文杰;李玲.热蒸镀法制备WO3薄膜及其电致变色性能[J].暨南大学学报(自然科学与医学版),2014(2):196-200. |
[5] | 谢红;杨修文.热蒸镀法与溶胶-凝胶法制备的WO3薄膜[J].光电子技术,2003(2):89-91,125. |
[6] | 饶峰;汪建勋;韩高荣.电子束蒸发制备氧化钨、氧化镍薄膜的电致变色性能[J].材料科学与工程学报,2004(5):683-687. |
[7] | 蓝满玉;王晨;汪炜.脉冲电泳沉积制备电致变色WO3薄膜[J].电子元件与材料,2011(2):43-46,49. |
[8] | 陈东初;韩冰;雷施;李文芳;赖悦腾.热分解法制备纳米WO3的结构特征及其分散行为研究[J].精细化工,2007(11):1047-1050,1055. |
[9] | 王大伟;黄世震.WO3基低浓度NO2气敏传感器的研究[J].计测技术,2006(z1):50-53. |
[10] | 余华梁;黄世震;林伟;陈伟.用气相反应法制备纳米WO3气敏材料[J].传感技术学报,2005(2):325-328. |
[11] | Chao Zhang;Marc Debliquy;Abdelhamid Boudiba;Hanlin Liao;Christian Coddet.Sensing properties of atmospheric plasma-sprayed WO3 coating for sub-ppm NO2 detection[J].Sensors and Actuators, B. Chemical,20101(1):280-288. |
[12] | Zhang, C.;Boudiba, A.;De Marco, P.;Snyders, R.;Olivier, M.-G.;Debliquy, M..Room temperature responses of visible-light illuminated WO_3 sensors to NO_2 in sub-ppm range[J].Sensors and Actuators, B. Chemical,2013:395-401. |
[13] | 林伟;黄世震;陈伟;颜志波;耿涛.磁控溅射WO3薄膜特性研究[J].郑州轻工业学院学报(自然科学版),2002(4):7-10. |
[14] | Choong-Yong Lee;Sun-Jung Kim;In-Sung Hwang;Jong-Heun Lee.Glucose-mediated hydrothermal synthesis and gas sensing characteristics of WO_3 hollow microspheres[J].Sensors and Actuators, B. Chemical,20091 Pt.B(1 Pt.B):236-242. |
[15] | Horprathum, M.;Limwichean, K.;Wisitsoraat, A.;Eiamchai, P.;Aiempanakit, K.;Limnonthakul, P.;Nuntawong, N.;Pattantsetakul, V.;Tuantranont, A.;Chindaudom, P..NO_2-sensing properties of WO_3 nanorods prepared by glancing angle DC magnetron sputtering[J].Sensors and Actuators, B. Chemical,2013:685-691. |
[16] | 魏培永;韩建强.SO2气体传感器的新进展[J].传感器技术,2001(3):1-3. |
[17] | Lee YJ.;Roh YR.;Cho HM.;Kim HB..Development of a SAW gas sensor for monitoring SO2 gas[J].Sensors and Actuators, A. Physical,19982(2):173-178. |
[18] | 文常保;朱长纯;巨永锋;邱彦章;许宏科;胡小东;吴媛;刘君华.基于WO3薄膜的双声路声表面波型SO2气体传感器[J].功能材料与器件学报,2009(1):1-6. |
[19] | Cantalini C.;Li Y.;Passacantando M.;Santucci S.;Comini E.;Faglia G.;Sberveglieri G.;Wlodarski W..Investigation on the O-3 sensitivity properties of WO3 thin films prepared by sol-gel, thermal evaporation and r.f. sputtering techniques[J].Sensors and Actuators, B. Chemical,20001/3(1/3):182-188. |
[20] | M. Bendahan;R. Boulmani;J.L. Seguin;K. Aguir.Characterization of ozone sensors based on WO_3 reactively sputtered films: influence of O_2 concentration in the sputtering gas, and working temperature[J].Sensors and Actuators, B. Chemical,20043(3):320-324. |
[21] | 余华梁;李静玲;吴一纯;李玉良;周赢武.紫外光照下WO3的H2S气敏特性研究[J].电子元件与材料,2014(5):53-56. |
[22] | 尹英哲;胡明;冯有才;陈鹏.直流反应磁控溅射WO3薄膜气敏特性研究[J].传感技术学报,2007(4):760-762. |
[23] | 魏少红;张岩;朱会敏;牛新书.掺SiO2的WO3纳米粉体的合成及其NO2气敏特性[J].电子元件与材料,2006(9):16-18. |
[24] | 牛新书;魏少红;许亚杰;蒋凯.SiO2-WO3纳米粉体的合成及其气敏特性[J].无机材料学报,2003(4):782-786. |
[25] | 林金阳;黄世震;林伟;陈伟;黄建敏.气相法WO3纳米粉体的H2S气敏性能研究[J].传感技术学报,2006(3):611-613. |
[26] | 牛新书;刘艳丽;胡平;徐甲强.共沉淀法SnO2-WO3粉体的气敏性能研究[J].电子元件与材料,2002(1):10-12. |
[27] | 邓永和;唐世洪;谭子尤;张勇华;梁平原;曾庆立.掺杂离子对O3气敏元件的影响[J].传感器技术,2002(4):13-14,17. |
[28] | Gui-Fang Meng;Qun Xiang;Qing-Yi Pan;Jia-Qiang Xu.The Selective Acetone Detection Based on Fe_3O_4 Doped WO_3 Nanorods[J].Sensor Letters: A Journal Dedicated to all Aspects of Sensors in Science, Engineering, and Medicine,20111(1):128-131. |
[29] | 李登峰;张覃轶;王爱华;桂阳海;谢长生.ZnO-WO3纳米复合氧化物的气敏性能研究[J].传感器与微系统,2006(3):22-24. |
[30] | Chen L.;Tsang SC..Ag dopedWO(3)-based powder sensor for the detection of NO gas in air[J].Sensors and Actuators, B. Chemical,20031/2(1/2):68-75. |
[31] | Xia HJ;Wang Y;Kong FH;Wang SR;Zhu BL;Guo XZ;Zhang J;Wang YM;Wu SH.Au-doped WO3-based sensor for NO2 detection at low operating temperature[J].Sensors and Actuators, B. Chemical,20081(1):133-139. |
[32] | 徐甲强;闫冬良;王国庆;田志壮;江青萍.WO3基H2S气敏材料的研究[J].硅酸盐学报,1999(5):591-596. |
[33] | Hoel A;Reyes LR;Saukko S;Heszler P;Lantto V;Granqvist CG.Gas sensing with films of nanocrystalline WO3 and Pd made by advanced reactive gas deposition[J].Sensors and Actuators, B. Chemical,20052(2):283-289. |
[34] | 桂阳海;崔瑞立;牛连杰;张勇.掺杂纳米WO3的制备及其气敏性能研究[J].矿产保护与利用,2009(6):32-35. |
[35] | 范小花;唐一科;侯长军;范瑛.Pt/WO3纳米薄膜的氢敏特性[J].材料科学与工程学报,2008(5):761-764,769. |
[36] | Thanittha Samerjai;Chaikarn Liewhiran;Anurat Wisitsoraat;Adisorn Tuantranont;Chanitpa Khanta;Sukon Phanichphant.Highly selective hydrogen sensing of Pt-loaded WO_3 synthesized by hydrothermal/impregnation methods[J].International journal of hydrogen energy,201411(11):6120-6128. |
[37] | Chao Zhang;Abdelhamid Boudiba;Cristina Nauio;Carlo. Bittencourt;Marie-Georges Olivier;Rony Snyders;Marc Debliquy.Highly sensitive hydrogen sensors based on co-sputtered platinum-activated tungsten oxide films[J].International journal of hydrogen energy,20111(1):1107-1114. |
[38] | Chao Zhang;Abdoul-Fatah Kanta;Hong Yin;Abdelhamid Boudiba;Jon D'Haen;Marie-Georges Olivier;Marc Debliquy.H_2 sensors based on WO_3 thin films activated by platinum nanoparticles synthesized by electroless process[J].International journal of hydrogen energy,20136(6):2929-2935. |
[39] | 颜鲁婷;吴洪鹏;周春燕;司文捷;苗赫濯.有机-无机纳米复合气敏材料研究进展[J].材料科学与工艺,2009(1):27-30. |
[40] | 桂阳海;崔瑞立;莫元妙;牛连杰.聚噻吩/WO3复合纳米材料的制备及气敏性能[J].电子元件与材料,2010(5):32-34,40. |
[41] | Mane, A. T.;Navale, S. T.;Patil, V. B..Room temperature NO2 gas sensing properties of DBSA doped PPy-WO3 hybrid nanocomposite sensor[J].Organic electronics,2015:15-25. |
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