通过改变N2/H2体积比,采用化学气相沉积法在TiC-TiCN层表面制备了不同微结构的TiN层.研究了TiN层微结构对TiC-TiCN-TiN多层涂层耐磨性能的影响机制,同时对比研究了国产多层涂层与国外公司同类涂层产品在结构、硬度及耐磨性能方面的不同.结果表明,当N2/H2体积比为1.5∶1时,获得的TiC-TiCN-TiN多层涂层硬度最高,摩擦系数最小,且耐磨性能优于国外公司同类涂层产品.多层涂层的硬度以及摩擦过程中生成氧化层的减摩作用对其耐磨性能有重要影响.
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