采用多弧离子镀技术在金属钛表面成功制备出连续致密且厚度均匀的α-Ta 相 Ta-10W涂层。在900℃下分别对涂层进行高温氧化和真空扩散处理,通过 XRD、SEM、EDS等分析测试手段对涂层的抗氧化性能及元素扩散行为进行研究。结果表明：在高温氧化过程中,存在氧化和扩散双重作用,涂层与基体间发生相互扩散且涂层表面形成氧化膜,致使涂层脆化,但涂层/基体界面处氧化不明显,说明Ta-10 W涂层对基体起到了有效的抗氧化作用；在真空扩散过程中,Ta向基体中扩散较为剧烈且沿着逐渐趋直的α-Ti晶界进行扩散。
Ta-10W coatings were successfully deposited on commercially pure titanium substrate by multi-arc ion plating technology.The samples were processed with thermal oxidation or vacuum diffusion at 900 ℃.The micro-structure and morphology of the samples and anti-oxidation property of the coatings were investigated by means of X-ray diffraction (XRD),scanning electronic microscope (SEM)and energy dispersive spectrometer (EDS).The results showed that oxide layer formed on the surface after thermal oxidation,however oxygen could hardly generate between coating and commercially pure titanium.During the vacuum heat treatment,the thickness of diffusion layer increased, and the elements diffuse through the grain boundary ofα-Ti.
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