采用多弧离子镀技术, 使用Ti-Al-Zr合金靶及Cr单质靶的组合方式, 在W18Cr4V高速钢基体上制备TiAlZrCr/(Ti, Al, Zr, Cr)N四元梯度氮化物膜. 利用SEM和XRD分析梯度膜的微观组织和结构, 使用摩擦磨损试验机研究梯度膜在室温(15 ℃)和高温(500 ℃)下的耐磨损特性, 并采用SEM观察磨痕形貌. 结果表明, 在不同沉积偏压下制备的四元梯度膜均具有fcc-NaCl型的TiN结构, 其组织致密均匀, 呈典型的柱状晶形态. 梯度膜的摩擦磨损机理是以塑性变形为主要特征的黏着磨损, 并伴有轻微的磨粒磨损. 在室温和高温下磨损时的平均摩擦系数分别在0.25~0.30和0.30~0.35之间, 且当沉积偏压增加至-200 V时, 梯度膜的耐磨损性能实现最优化.
Nowadays, the cutting tools are exposed to much more severe operating conditions, i.e. high cutting speed, high feed rate, aggressive mechanical and thermal loading. As a result, the existing hard films have frequently encountered wear-related failures. Such situation requires the new generation hard films concurrently displaying superior hardness, excellent adhesive strength and outstanding wear resistance. Previous studies have demonstrated some promising mechanical properties (hardness and adhesion strength) of TiAlZrCr/(Ti, Al, Zr, Cr)N quaternary gradient films as compared to those of the (Ti, Al)N binary and (Ti, Al, Zr)N or (Ti, Al, Cr)N trinary nitride films. However, the research on wear resistance of hard films under the conditions of high speed and dry friction has been seldom reported. In this work, using combined Ti-Al-Zr alloy and pure Cr targets, TiAlZrCr/(Ti, Al, Zr, Cr)N quaternary nitride films were deposited on high speed steel W18Cr4V substrates by multi-arc ion plating (MAIP) process at various bias voltages of -50, -100, -150 and -200 V. Surface morphology and crystalline struc ture of the gradient films were analyzed by SEM and XRD. Wear resistance of the films was evaluated by abrasion tester at both ambient (15 ℃) and elevated (500 ℃) temperatures. The worn surface morphology was then investigated by SEM. The results show that the deposited TiAlZrCr/(Ti, Al, Zr, Cr)N quaternary nitride films exhibited TiN-type (fcc-NaCl type) structure. The films have uniform and dense columnar morphologies. Furthermore, it was confirmed that the primary wear mechanism was adhesive wear (caused by plastic deformation) accompanied by a slight abrasion. The average values of friction coefficient varied at 0.25~0.30 at ambient temperature and 0.30~0.35 at elevated temperature, respectively. Finally, the best wear resistance was achieved when the bias voltage increased to -200 V.
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