为提高Inconel 718零件的抗磨损性能,采用直线式高能离子注入机对Inconel 718材料进行表面强化.利用X射线衍射仪、电子背散射衍射、X射线光电子谱、俄歇电子能谱等表征材料的组织结构、相组成和元素浓度-深度分布,采用纳米压痕仪、摩擦磨损试验机检测材料的纳米硬度和摩擦磨损性能.结果表明,不同离子注入工艺对Inconel 718抗磨损性能提升具有不同效果,(N+Ti)组合注入可提升基体抗磨损性能达2.5倍以上,纳米硬度提升幅度达到36％.(N+Ti)组合注入工艺在Inconel 718表层形成非晶以及纳米级TiNx析出相,随注入深度增加,注入原子主要以间隙或置换形式存在于基体晶格中.
In order to improve the wear resistance of Inconel 718 workpieces,high energy implanter was employed to modify the surface characteristics of Inconel 718.The microstructure,phase and compositional depth profile of Inconel 718 treated by different ion implantation were examined by X-ray diffraction (XRD),electron back scattered diffraction (EBSD),X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES).The nano-hardness and tribological properties were tested by nanoindentation and tribometer.Results show that different ion implantation processes have different effects on the improvement of anti-wear performance of Inconel 718.Among them,the dual (N+Ti) implantation process can increase the anti-wear performance of the substrate by 2.5 times and its nano-hardness by 36％,respectively.The main reason is that the dual (N+Ti) implantation technology can form amorphization and nano-phase TiNx on the surface of Inconel 718,and the implanted atoms exists in lattice of the substrate in the forms of interstitial and substitutional atoms along with the increase of implantation depth.
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