采用复合离子镀技术,在不同脉冲负偏压幅值下于304不锈钢表面制备TiCN 薄膜,研究了负偏压幅值对薄膜成分、结构、表面粗糙度、显微硬度及摩擦磨损性能的影响.结果表明：随着负偏压幅值升高,钛、碳与氮元素的原子比以及碳与钛元素的原子比先增大后减小,薄膜表面的颗粒及针孔、凹坑等缺陷尺寸减小,数量减少,表面形貌得到改善；薄膜主要由 TiCN 相组成,随着负偏压幅值增大出现(111)晶面择优取向,且薄膜的显微硬度先增大后减小,并在负偏压幅值为300 V时达到最大,为2690 HV；薄膜的摩擦磨损性能优于基体的,随着负偏压幅值增加,薄膜的摩擦因数不断降低,在负偏压幅值为300 V时约为0．355,此时薄膜的摩擦磨损性能最优.
TiCN film was prepared on 304 stainless steel at different pulse negative bias amplitudes by the compound ion plating technology.The effects of pulse negative bias amplitude on composition,structure,surface roughnesss,microhardness and friction and wear properties of the film were studied.The results show that,with the increase of negative bias amplitude,the atom ratio of Ti and C to N first increased and then decreased,as well as the ratio of C to Ti.The size of particles,pinholes and pits on the film surface decreased,and their quantity also reduced with the increase of negative bias amplitude,these improve the surface morphology of the film.The film was mainly composed of TiCN phase,presenting the (111)preferred orientation with the increase of negative bias amplitude.In addition,microhardness of the film first increased then decreased with the increase of negative bias amplitude,reaching a maximum of 2 690 HV at 300 V.Friction and wear properties of the film are always better than that of the substrate,and the friction coefficient of TiCN film decreased with the increase of negative bias amplitude;when the negative bias amplitude was 300 V,the friction coefficient was up to 0.355,indicating that the optimal friction and wear properties was achieved.
参考文献
| [1] | 吴玉广;任德亮;徐前.离子镀膜技术在制造业中的应用[J].航空制造技术,2003(9):64-66. |
| [2] | 刘建华;邓建新;张庆余.TiAlN涂层刀具的发展与应用[J].工具技术,2006(4):9-13. |
| [3] | 张启沛;钟喜春;李春明;郭燕伶;余赟;焦东玲;匡同春.电弧离子镀与磁控溅射复合技术制备Ti/TiN/TiAlN复合涂层的组织结构与力学性能[J].真空科学与技术学报,2015(2):195-200. |
| [4] | 张海平;王守仁;郭培全.TiAlN基薄膜的研究进展[J].机械工程材料,2013(4):1-5. |
| [5] | 卢国英;林国强.脉冲偏压电弧离子镀CrAlN薄膜研究[J].真空科学与技术学报,2006(6):441-445. |
| [6] | 唐达培;高庆;江晓禹.TiN,TiC和Ti（C,N）涂层的性能及影响因素研究[J].材料保护,2005(3):42-46. |
| [7] | 许俊华;曹峻;喻利花.磁控溅射制备 TiCN 复合膜的微结构与性能[J].中国有色金属学报,2012(11):3123-3128. |
| [8] | 戴建伟;许振华;王凯;何利民;牟仁德.不同温度下沉积TiN/TiCN/Al2O3/TiN复合涂层的物相结构和性能[J].机械工程材料,2014(7):84-89. |
| [9] | 鲜广;赵海波;范洪远;王辉;王均;杜昊.石墨靶和钛靶共溅射制备的TiCN薄膜的结构和性能[J].真空科学与技术学报,2015(5):614-619. |
| [10] | 杨娟 .脉冲偏压电弧离子镀氮化铬涂层的制备技术及性能[D].西南大学,2009. |
| [11] | Kumagai M.;Yukimura K.;Kuze E.;Maruyama T.;Kohata M.;Numata K.;Saito H.;Ma XX..Macroparticles on titanium nitiride thin film prepared by cathodic-arc plasma-based ion implantation and deposition[J].Surface & Coatings Technology,20030(0):401-404. |
| [12] | M. Leparoux;Y. Kihn;S. Paris.Microstructure analysis of RF plasma synthesized TiCN nanopowders[J].International Journal of Refractory Metals & Hard Materials,20084(4):277-285. |
| [13] | 别利芳 .多弧离子镀制备TiC薄膜的工艺及性能研究[D].武汉科技大学,2007. |
| [14] | 赵彦辉;林国强;李晓娜;董闯;闻立时.脉冲偏压对电弧离子镀Ti/TiN纳米多层薄膜显微硬度的影响[J].金属学报,2005(10):1106-1110. |
| [15] | 李铭志 .C掺杂对CrTiAlN镀层的组织结构和性能研究[D].西安理工大学,2010. |
| [16] | Lackner JM;Waldhauser W;Ebner R;Bakker RJ;Schober T;Major B.Room temperature pulsed laser deposited (Ti,Al)CxN1-x coatings - chemical, structural, mechanical and tribological properties[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,20041/2(1/2):125-133. |
- 下载量()
- 访问量()
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%