电子束熔炼具有高能量密度、高真空度等优点，能够有效地去除硅中的挥发性杂质，使其在制备太阳能级多晶硅材料方面具有巨大的优势和广阔的应用前景，目前已经实现了产业化应用，成为冶金法制备太阳能级硅材料的关键环节之一。本文在阐述挥发性杂质去除的热力学原理的基础上，对其去除效果和去除机制进行了总结。同时，针对电子束熔炼技术目前存在的问题，结合作者在这些方面的探索，从数值模拟、节能型熔炼方式以及与定向凝固技术的耦合等角度对现阶段的研究重点进行了综述，并对其未来的发展趋势进行了展望。
Electron beam melting is an effective method to remove volatile impurities in silicon due to its characteris-tics of high energy density and high vacuum degree, which has huge advantages and wide application prospects in preparation of solar-grade silicon. Currently it has been successfully applied in industry and become one of the key procedures for preparation of solar-grade silicon by metallurgical route. Based on the thermodynamic principle of the volatile impurities removal, the removal efficiency and mechanism are summarized in this paper. According to current problems of this technology combined with our own experience, the emphasis of current research is reviewed from the points of numerical simulation, energy-saving melting technology and coupling with directional solidification tech-nology. The future development direction of this technology is also proposed.
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