利用TFCcal设计软件构建膜系结构,采用溶胶-凝胶工艺和提拉法在超白玻璃上制备出厚度精确可控的宽光谱、高增透型SiO2/TiO2/SiO2-TiO2减反膜,同时结合甲基三乙氧基硅烷(MTES)改性碱催化的SiO2溶胶,通过提拉法一次制备出高透过率疏水型薄膜.研究表明,高增透型三层宽光谱减反膜的理论膜层厚度依次为:80.9 nm(内层SiO2-TiO2)、125.0 nm(中间层TiO2)、95.5 nm(外层SiO2),其在400～700 nm可见光范围内平均透过率实际可高达97.03％以上.多层膜经过退火处理后,膜面的水接触角高达131.5°,同时陈化两个月以后的多层膜透过率仅下降0.143％,表明制备的SiO2/TiO2/SiO2-TiO2多层减反膜具有优良的疏水和耐环境性能.
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