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采用CuIn0.7Ga0.aSe2、In0.7Ga0.3Se和CuSe为原料,一步热压烧结法制备CIGS靶材.通过阿基米德法、XRD、Raman、SEM和EDS等测试方法研究了CuSe液相辅助烧结对靶材的相对密度、物相组成、结构、形貌以及成份的影响.结果表明,加入CuSe在高温下产生液相能显著促进烧结,比不加入CuSe的体系的烧结温度下降了50℃.当烧结温度为575℃时,获得的靶材相对密度为96.18%,物相单一纯净,微观结构致密,晶粒发育良好.以摩尔比为Cu∶In∶Ga∶Se=23.0∶18.2∶6.5∶52.3的靶材,通过溅射-热处理法制备CIGS薄膜,并完成AZO/ZnO/CdS/CIGS/Mo单电池的组装(0.25 cm2),获得了9.6%的光电转换效率.

参考文献

[1] 梅迪 .单靶磁控溅射制备CIGS薄膜[D].电子科技大学,2011.
[2] C. Suryanarayana;E. Ivanov;R. Noufi;M. A. Contreras;J. J. Moore.Synthesis and processing of a Cu-In-Ga-Se sputtering target[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,19981/2(1/2):340-344.
[3] Wei-Hsiang Hsu;Hsing-I. Hsiang;Fan-Chun Yen.Low-temperature sintered CuIn_(0.7)Ga_(0.3)Se_2 prepared by colloidal processing[J].Journal of the European Ceramic Society,201214(14):3753-3757.
[4] Zhang Ning;Zhuang Da-Ming;Zhang Gong.An investigation on preparation of CIGS targets by sintering process[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,20101(1):34-40.
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