施主受主共掺杂的荧光4H-SiC可以通过复合发出可见光,影响其发光性能的一个重要因素是施主-受主掺杂的浓度.本研究通过PVT生长方法制备了3英寸N-B-Al共掺的4H-SiC晶体,采用Raman光谱、SIMS对晶体的结晶类型和掺杂浓度进行了表征;采用PL发射谱和激发谱、荧光衰减曲线表征和内量子效率对晶体的发光波长、强度、施主-受主对复合发光性能进行了研究.结果发现,低浓度Al掺杂样品在室温下发出黄绿色荧光.低浓度Al掺杂在晶体中提供较少的受主;高浓度B、N掺杂形成施主,从而贡献充足的电子-空穴对.这些电子-空穴的复合提高了施主-受主对复合的内量子效率,进而增强光致发光强度,增加平均发光寿命.
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