目的：在SiH4气氛下制备Si掺杂的TiSiN纳米复合涂层,为SiH4用于工业化TiSiN涂层生产提供依据。方法采用电弧离子镀技术,在SiH4气氛下,于单晶硅和硬质合金衬底上制备Si掺杂的TiSiN纳米复合涂层,研究SiH4流量对TiSiN涂层化学组分、微观结构、硬度和耐磨性能的影响。结果 SiH4流量对TiSiN纳米复合涂层的微观结构、硬度及摩擦系数的影响明显。随着SiH4流量的增加,TiSiN涂层由柱状晶生长的晶体结构逐渐转变为纳米晶镶嵌于非晶基体的复合结构。 Si在涂层中以Si3 N4非晶相存在,随着涂层中Si含量逐渐增加,TiN晶粒尺寸逐渐减小,Si3 N4起到细化晶粒的作用。在42 mL/min的SiH4流量下,涂层硬度高达4100HV0.025。在对磨材料为硬质合金的条件下,TiSiN涂层摩擦系数小于0.6。结论 SiH4气氛下可以制备出TiN纳米晶镶嵌于Si3N4非晶相结构的TiSiN纳米复合涂层,涂层的显微硬度较高。 SiH4可以作为Si源用于TiSiN纳米复合涂层的工业化生产。
ABSTRACT:Objective To fabricate Si-doped TiSiN nanocomposite coatings in SiH4 ambient, and to provide approaches to fabri-cate TiSiN nanocomposite coatings using SiH4 in industrial production process. Methods TiSiN coatings were deposited on Si and cemented carbide substrates by cathodic arc ion plating in SiH4 ambient. The effects of SiH4 flow rate on the chemical composition, microstructure, mechanical and tribological properties of the TiSiN nanocomposite coatings were systemically investigated. Results The SiH4 flow rate had an obvious effect on the chemical composition, microstructure, mechanical and tribological properties of the TiSiN nanocomposite coating. With the increase of SiH4 flow rate, the structure of fabricated TiSiN coatings changed from columnar grain to composite structure of nanocrystalline embedded in amorphous phase matrix. The Si added in the coatings was in the amor-phous Si3 N4 phase, with the Si content increased, the grain size of TiN decreased, which had a grain refining effect. The micro-hardness reached up to 4100HV0. 025 at the SiH4 flow rate of 42 mL/min (6. 3 at.% Si in the coating). Friction coefficients of TiSiN nanocomposite coatings increased with the increasing SiH4 flow rate when tested against carbide balls, and the friction coeffi-cient was less than 0. 6. Conclusion The TiSiN nanocomposite coating of nanocrystalline embedded in amorphous matrix could be fabricated in SiH4 ambient. The microhardness was relatively high. SiH4 could be used for the deposition of TiSiN nanocomposite coatings in commercial process.
参考文献
| [1] | VEPREK S;REIPRICH S .A Concept for the Design of Novel Superhard Coatings[J].THIN SOLID FILMS,1995,268:64. |
| [2] | Li Shipeng;Dengjianxin;Yan Guangyuan .Effects of nitrogen flowrates on properties of TiSiN coatings deposited by arc ion plating combining with medium-frequency magnetron sputtering[J].International Journal of Refractory Metals & Hard Materials,2014(Jan.):108-115. |
| [3] | Correlation between thermal fatigue and thermomechanical properties during the oxidation of multilayered TiSiN nanocomposite coatings synthesized by a hybrid physical/chemical vapour deposition process[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2010(21):5932-5937. |
| [4] | Vipin Chawla;R. Jayaganthan;Ramesh Chandra .A study of structural and mechanical properties of sputter deposited nanocomposite Ti–Si–N thin films[J].Surface & Coatings Technology,2010(9/10):1582-1589. |
| [5] | 马大衍,马胜利,徐可为.TiN基纳米复合超硬薄膜的摩擦磨损特性[J].中国表面工程,2004(02):18-25. |
| [6] | 赵永生,李伟,刘平,马凤仓,刘新宽,陈小红,何代华.TiSiN纳米复合结构涂层的研究进展[J].机械工程材料,2013(06):6-10,38. |
| [7] | YAZDI M;LOMELLO F;WANG J et al.Properties of TiSiN Coatings Deposited by Hybrid HiPIMS and Pulsed-DC Magnetron Co-sputtering[J].VACUUM,2014,109:43-51. |
| [8] | 王振玉,徐胜,张栋,刘新才,柯培玲,汪爱英.N2流量对HIPIMS制备TiSiN涂层结构和力学性能的影响[J].金属学报,2014(05):540-546. |
| [9] | Ma DY;Ma SL;Xu KW .Influence of Si content on Nano-structured Ti-Si-N films coated by pulsed-d.c. plasma enhanced CVD[J].Surface & Coatings Technology,2004(2/3):182-187. |
| [10] | 刘传胜,杨种田,杨兵,田灿鑫,付德君.多弧-磁控溅射法制备Ti-Si-N纳米复合涂层及涂层的结构和力学性能[J].粉末冶金材料科学与工程,2010(06):543-548. |
| [11] | 李士鹏,邓建新,闫光远,程宏伟.电弧-磁控复合沉积TiSiN涂层及其切削性能研究[J].航空制造技术,2013(14):72-77. |
| [12] | CAMPS I;MUHL S;CAMPS E et al.Tribological Properties of TiSiN Thin Films Deposited by Laser Ablation[J].Surface and Coatings Technology,2014,255:74-78. |
| [13] | Chi-Lung Chang;Chao-Te Lin;Pi-Chuen Tsai;Wei-Yu Ho;Da-Yung Wang .Influence of bias voltages on the structure and wear properties of TiSiN coating synthesized by cathodic arc plasma evaporation[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(16):5324-5329. |
| [14] | Guo, CT;Lee, D;Chen, PC .Deposition of TiSiN coatings by arc ion plating process[J].Applied Surface Science,2008(10):3130-3136. |
| [15] | Zhang P;Cai ZH;Xiong WQ .Influence of Si content and growth condition on the microstructure and mechanical properties of Ti-Si-N nanocomposite films[J].Surface & Coatings Technology,2007(15):6819-6823. |
| [16] | 石玉龙;彭红瑞;李世直 .Si 对TiSiN 膜组成结构的影响[J].功能材料,1999,30(01):66-67. |
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