材料期刊网

目的：利用垂直冲击电镀装置制备机械研磨电镀铜镀层。方法在普通酸性镀铜液中分别加入玻璃球、铜球、铅球，在垂直冲击电镀装置振幅为4 mm、频率为12 Hz的情况下制备30μm的铜镀层，利用电子扫描电镜（SEM）观察镀层表面微观形貌，研究不同密度研磨介质球对镀层晶胞大小的影响；利用恒电位仪测量机械研磨电镀过程中的阴极极化程度，研究机械研磨电镀晶胞细化机制；利用失重法测试镀层在3.5%（质量分数）的 NaCl 溶液中的腐蚀速度，研究介质球密度与铜镀层腐蚀速度之间的关系；利用电化学测试技术验证介质球密度与铜镀层腐蚀速度之间关系的一致性。结果与普通铜镀层相比，机械研磨铜镀层晶胞细小，耐蚀性较好；铅球机械研磨铜镀层晶胞最小，耐蚀性最好；铜球机械研磨铜镀层晶胞次之，耐蚀性次之；玻璃球机械研磨铜镀层晶胞最大，耐蚀性最差。结论介质球密度为(2～12.3)×103 kg/m3时，随着介质球密度的增大，铜镀层晶胞减小，耐蚀性提高。

Objective To polish plating copper coatings by vertical impact electroplating device.MethodsGlass ball, cop-per ball and lead ball were added to acid copper plating solution. Copper plating coatings with a thickness of 30 μm were pre-pared when the swing of the vertical impact electroplating device was 4 mm and its frequency was 12 Hz. Scanning electron mi-croscopy (SEM) was used to observe the microstructure of the plating surface and study the effect of grinding media ball with different densities on unit cell size. The refinement mechanism mechanical grinding electroplating cell was studied by measuring the cathodic polarization degree in the process of mechanical polishing plating using potentiostat. The corrosion speed of plating in 3.5% NaCl solution of mass fraction was tested using gravity losing method to study the relationship between medium ball density and corrosion speed of copper plating. The relationship between medium ball density and corrosion speed of copper plating was verified employing electrochemical measurement technology.ResultsCompared with the ordinary coating, the crystal cells of mechanical polishing copper plating were smaller and the corrosion resistance was better. According to the test results, the crystal cells of mechanical polishing copper plating using lead ball were the smallest and the corrosion resistance was the best. The crystal cells of copper ball mechanical polishing copper plating and the corresponding corrosion resistance took the second place. The crystal cells of glass ball mechanical polishing copper plating were the largest and the corrosion re-sistance was the worst. ConclusionThe smaller the copper plating cell was, the better corrosion resistance was as the density of medium ball increased in certain density range (2~12.3)×103kg/m3.