目的 研究具有选择性键合作用的掺杂金属元素(Cu、Al、Ti)对类金刚石(DLC)薄膜的结构和摩擦学性能的影响.方法 以高纯石墨及其与金属复合靶作为靶材,采用离子源镀膜技术分别在n-型(100)单晶硅片和抛光304不锈钢片基体上制备金属-DLC复合膜.采用514.6 nm氩离子激发源的Raman光谱仪,对金属-DLC复合薄膜进行拉曼光谱分析.采用努氏硬度计和表面轮廓仪测量计算薄膜的硬度和残余应力.采用原子力显微镜(AFM)观察DLC薄膜的表面形貌和结构.使用球-盘滑动磨损试验机对DLC复合薄膜进行摩擦学性能分析.结果 类金刚石薄膜中掺入不同金属元素掺杂后,摩擦系数保持相对稳定,但磨损率存在较大差异.无掺杂DLC膜中的sp3键含量最高,薄膜硬度高,残余应力大,在摩擦过程中易脱落.Ti-DLC金属复合膜的表面质量最好,结构致密,残余应力释放的同时保持较高的硬度,测得其磨损率最低,为0.13×10-15 m3/nm.结论 通过在DLC膜中掺杂不同键合能力的金属元素能够调控DLC薄膜的微观结构,改善薄膜的力学性能(硬度、残余应力),提高薄膜的抗磨损性能.薄膜的摩擦学性能与薄膜的微观结构与金属掺杂元素的存在形态有关.
The work aims to study effects of DLC films doped with metallic elements (Cu,Al,Ti) featuring in selective bonding on structure and tribological properties of such DLC films. With high purity graphite and metallic composite target as targets, metallic composite DLC films were fabricated on n-(100) single crystal silicon wafers and polished stainless steel sheets 304 by applying ion-source plating technology. The Raman Spectrometer excited by 514.6 nm Ar+ was used to analyze the me-tallic composite DLC films. Knoop hardness tester and surface profiler were used to calculate microhardness and residual stress of the metallic composite films. AFM was used to analyze morphology and structure of DLC films. Ball-disk sliding abrasion tester was used to analyze tribological property. The films doped with different metallic elements exhibited various properties. The wear rate changed a lot while frictional coefficient was stable after doping with different metallic elements. The original DLC films featured in maximum content of sp3 bonding, high hardness, residual stress and easy falling-out during friction process. The Ti-DLC composite films featured in good surface quality and compact structure. The films maintained at high hardness while releasing residual stress. The minimum measured wear rate of Ti-DLC composite films was 0.13×10-15 m3/nm. Doping different metallic elements in DLC films can control microstructure, improve mechanical properties (including hardness and residual stress) and abrasion resistance obviously. The tribological properties of the films are closely related to film micro-structure and the existing form of metallic elements.
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