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采用化学水浴法制备了结构为CdS/CdS的薄膜,并结合电子束真空蒸发法,在两层CdS之间沉积一层Dy单质制备了结构为CdS/Dy/CdS的Dy掺杂薄膜.XRD和SEM测试表明,未掺杂的薄膜为沿(111)晶面择优生长的立方相闪锌矿结构,但是含有Dy掺杂层的CdS薄膜则为立方相和六方相的混合结构,并且掺Dy后CdS的晶粒尺寸和晶格常数变大.XPS分析表明,两种样品均富Cd,掺Dy有助于降低薄膜中O和C的含量,进而抑制薄膜中氧化物的形成;未掺杂时薄膜表面和内部Cd、S的原子比分别为1∶0.63和1∶0.71,掺Dy后分别提高到1∶0.81和1∶0.83,更接近CdS的化学计量比,而且组分更加均匀.

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