采用金属等离子体基离子注入的方法,在Ag基体上注入了Al.用X射线光电子能谱仪(XPS)对注入层的Al浓度-深度分布和化学态进行了分析.用X射线衍射法(XRD)对注入层和非平衡磁控溅射的Al沉积层相组成进行了测定和比较,选用小掠射角(3°)XRD对注入层的相组成进行了测定.结果表明,注入层中Al浓度沿深度方向逐渐降低,表面有Ag原子存在;近表面处形成了Ag-Al固溶体并且出现了少量的μ-Ag3Al相;较深处有氧化铝的形成,出现Ag-Al固溶体、μ-Ag3Al相和氧化铝三相共存;更深处,Al含量很快下降,Ag-Al固溶体消失,出现μ-Ag3Al相和氧化铝共存.μ-Ag3Al相为β-Mn复杂立方结构,可以在很宽的Al含量范围内形成,而Al沉积层中未出现Ag3Al相.
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