利用硅胶吸附一解吸臭氧原理自制了臭氧浓缩装置,通过此装置制备的高浓度臭氧作为分子束外延制备Bi系氧化物薄膳的氧化源.在臭氧浓缩装置中,硅胶温度保持在-85℃左右,工作6 h,可获得浓度(摩尔分数)高于95%的臭氧,当臭氧浓缩装置中压强保持在1.3×103Pa,该臭氧浓度可维持5 h以上.X射线衍射结果表明,制备的高浓度臭氧在高真空条件下可将Cu氧化成CuO,并以此为氧化源利用分子束外延在MgO(100)衬底上制备了较高质量的Bi2Sr2CuO6+x和Bi2Sr2CaCu2O8+x薄膜.
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