采用中频磁控溅射法(MFMS)制备不同厚度的铝膜;利用直线型四探针法测量不同厚度铝膜的电导率,研究了铝薄膜直流电导率随厚度的变化关系(尺寸效应);用矢量网络分析仪测量了铝膜与FR4环氧树脂玻纤板复合结构微波吸收率;研究了电导率尺寸效应对铝膜微波吸收性能的影响.结果表明:薄膜厚度对铝膜的电导率有明显影响;在铝膜与FR4环氧树脂玻纤板复合结构中,铝膜电导率的变化对复合结构的吸收率峰值影响不大,但对与吸收峰值对应的铅膜厚度影响显著.利用传输矩阵方法验证了实验结果.
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