本文采用直接敷铜工艺,1070°C流动氮气氛下保温3h制得剥离强度达11.5Kg/cm2的直接敷铜Al2O3基板.界面产物CuAlO2的形成是获得较高结合强度的关键.敷接温度下,在界面上产生了能很好润湿Al2O3表面的Cu[O]共晶液体,并反应生成了连续的CuAlO2层.降温时,共晶液体从Cu侧开始固化并淀析出Cu2O颗粒.当固化前沿与CuAlO2层相遇时,液相参与的界面反应停止.冷却至室温,即可获得Cu和Al2O3基板之间的牢固结合.
Cu-Cu2O eutectic bonding of copper to Al2O3 was investigated. The highest peel strength was 11.5kg/cm for the specimen prepared at 1070C for 3h in nitrogen atmosphere. Oxygen promoted the wetting between copper and Al2O3 greatly. Cu[O] melt reacted with the alumina and formed 奱 continuous CuAlO2 layer, which enhanced the peel strength of the joint. On cooling, the solidification front moved from the solid copper towards alumina, and Cu2O precipitated from the Cu[O] melt. When the solidification front met the CuAlO2 layer, liquid-aided reaction completed and a reliable bond was achieved between the copper and Al2O3 substrate
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