以无机盐SnCl22H2O，Y(NO3)36H2O为原料，无水乙醇为溶剂，采用溶胶-凝胶工艺制备了Y2O3掺杂的SnO2薄膜. 采用差热--失重分析研究了Y2O3掺杂的SnO2干凝胶粉末的热分解、晶化过程. 研究了Y2O3-SnO2薄膜的电学和气敏性能. 从实验中得到了Y2O3掺杂份量对SnO2薄膜电学及气敏性能的影响. 实验表明Y2O3掺杂的SnO2薄膜在常温下对NOx具有较好的灵敏度和选择性,并具有较好的响应恢复性能; 在常温下对H2S气体也具有一定的灵敏度.
Pure and Y2O3 doped SnO2 gas sensitive thin films were prepared by the sol-gel technique by using non-alkoxide SnCl22H2O，Y(NO3)36H2O as precursors. The thermal decomposition and crystallization process of 1mol%Y2O3-SnO2 thin films and the effect of doping amount on the electrical and gas sensitive properties of SnO2 thin films were studied. The Y2O3-SnO2 film shows novel gas sensing properties (good sensitivity, high selectivity and quick response behavior) toward low concentration of NO2 at room temperature.
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