Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

无机材料学报, 2001, 16(2): 305-310. doi: 10.3321/j.issn:1000-324X.2001.02.018

Ba0.9Sr0.1TiO3薄膜的椭偏光谱研究

阳生红 ^1, , 李辉遒 ^2, , 张曰理 ^3, , 莫党 ^4, , 田虎永 ^5, , 罗维根 ^6, , 蒲兴华 ^7, , 丁爱丽 ^8,

1.中山大学物理系,

2.中山大学物理系,

3.中山大学物理系,

4.中山大学物理系,

5.中国科学院上海硅酸盐研究所

6.中国科学院上海硅酸盐研究所

7.中国科学院上海硅酸盐研究所

8.中国科学院上海硅酸盐研究所

关键词：椭偏光谱 , 光学常数谱 , BST薄膜

Spectroscopic Ellipsometry Studies of Ba0.9Sr0.1TiO3 Thin Films

用椭偏光谱仪首次在光子能量为2.15.2eV的范围内，测量了不同热处理温度下Ba0.9Sr0.1TiO3(BST)薄膜的椭偏光谱.建立适当的拟合模型，并用Cauchy色散模型描述BST薄膜的光学性质，用最优化法获得了所有样品的光学常数(折射率n和消光系数k)谱及禁带能Eg.比较这些结果，初步得到了BST薄膜的折射率n、消光系数k和禁带能Eg随退火温度变化的变化规律.

Ellipsometric spectra of Ba0.9Sr0.1TiO3(BST)thin films with various annealing tem-peratures were measured in the range of photon energy from 2.1 to 5.2eV.Constructing appropriate fitting models and describing optical properties of the BST with Cauchy dispersion model,their optical constants (refractive index n and extinction coefficient k) spectra and band gap Eg were determined by means of an optimization.Compared these results,we obtained the variation of the refractive index n,the extinction coefficient k and the band gap Eg with annealing temperatures.

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