采用有机凝胶法制备了Sr0.5Ba0.5Nb2O6(SBN50)铁电薄膜.研究了pH值和EDTA的用量对Sr-Ba-Nb前驱体溶液稳定性的影响,并对不同pH值条件下获得的Sr-Ba-Nb干凝胶的热分解历程进行了对比.计算和实验结果表明,制备Sr-Ba-Nb前驱体溶液的最佳pH=8,EDTA:金属离子(摩尔比)=2:1.在700℃下退火30min所得SBN50薄膜为单一钨青铜结构多晶薄膜.室温下,测试频率1kHz时,薄膜的介电常数为221,介电损耗为0.02,剩余极化强度Pr=8.17μC/cm2,矫顽场Ec=16.9kV/cm.
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