以SiCl4-NH3-H2为反应体系,采用化学气相渗透(CVI)法制备Si3N4P/Si3N4透波材料.XRF测试表明试样主要含Si、N、O三种元素.XRD测试表明复合材料主要成分为α-Si3N4和非晶沉积物和非晶SiO2,并有微量的β-Si3N4和晶体Si,高温热处理可使非晶沉积物转变为α-Si3N4和β-Si3N4.SEM照片显示颗粒团间结合不够致密,残留气孔偏大.试样的弯曲强度最高为94MPa,介电常数为4.1~4.8.
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