研究了激光辐照引起Ge2Sb2Tes非晶态薄膜的电/光性质变化,当激光功率为580mW时薄膜的方块电阻有四个数量级(107~103Ω/口)的突变;对电阻发生突变前、中、后的三个样品进行了XRD测试,结果表明,随着激光功率的增大,薄膜由非晶态向晶态转变,用椭偏仪测试了结构转变前、中、后三个样品的光学常数,在可见光范围内薄膜的光学常数在波长相同情况下有: n非晶态>n中间态,k晶态>k中间态>k非晶态,α晶态>α中间态>α非晶态,结合电阻变化曲线和XRD图谱讨论了激光辐照Ge2Sb2Te5非晶态薄膜的电/光性质变化同激光功率和结构转变之间的关系.
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