采用化学共沉淀法制备Y2O3,ZrO2,Er2O3和Sb2O3掺杂SnO2基气体传感器.结果表明掺杂后的材料经煅烧后,平均晶粒尺寸均小于30 nm,比未经掺杂的材料小将各掺杂体系不同成分材料制备成厚膜传感器,进行了对CO气体敏感度性能测试,发现掺杂稀土氧化物的气体敏感度较纯SnO2厚膜传感器高.其中掺杂Er2O3材料性能最好.
Nanocrystalline SnO2 powders doped with different metal oxides including Y2O3,ZrO2, Er2O3 and Sb2O3 were synthesized by chemical co-precipitation method. The Y, Er and Zr-SnO2 are new systems and have not been reported before. The influence of dopants on the crystallite size and electrical properties has been characterized. The results showed that SnO2 powders doped with 3% ～5% (mass fraction) Y2O3 or Sb2O3 have smaller crystallite sizes than that of the undoped material. The crystallite sizes were less than 30nm while the calcination temperatures were up to 1050 ℃. Grain growth was significantly inhibited by the Sb doping. Measurements of electrical property for the doped sensors showed higher sensitivity to CO at 350 ℃ than the pure SnO2 sensor.Among these doping oxide sensors, Er2O3 doped sensor had the highest sensitivity to CO gas.
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