以N(C8H15)+4OH-为催化剂,用正硅酸乙脂(TEOS)溶胶-凝胶工艺制备出纳米多孔二氧化硅薄膜.体系的H2O/TEOS＞25,强碱催化使二氧化硅的溶解度增大并使二氧化硅胶粒带负电荷,抑制了二氧化硅的聚合.丙三醇与TEOS的水解中间体Si(OC2H5)4-x(OH)x及二氧化硅胶粒SixOy(OH)+nz表面Si-OH形成氢键,抑制了二氧化硅的聚沉.聚乙烯醇(PVA)使粒状二氧化硅溶胶具有网状结构,易于成膜.薄膜由致密结构转化为均匀纳米多孔结构是构成薄膜的二氧化硅胶粒在热处理时聚集和塑性形变的结果.多孔二氧化硅薄膜的折射率为1.27～1.42,介电常数为1.578～2.016,热导率为0.2 W/(m@K).
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