采用反应磁控溅射制备了具有不同调制周期的AlN/(Ti,Al)N纳米多层膜,研究了亚稳相立方氮化铝(c-AlN)在纳米多层膜中的生长条件及其对薄膜力学性能的影响.结果表明:在小调制周期下AlN以立方结构存在,并与(Ti,Al)N层形成同结构共格外延生长,使纳米多层膜产生较大的晶格畸变.与此相应,AlN/(Ti,Al)N纳米多层膜硬度和弹性模量随调制周期的减小呈单调上升的趋势,当调制周期小于8～10 nm时其增速明显增大,并在调制周期为1.3 nm时达到最高硬度29.0 GPa和最高弹性模量383 GPa.AlN/(Ti,Al)N纳米多层膜的硬度和弹性模量在小调制周期时的升高与亚稳相c-AlN的产生并和(Ti,Al)N形成共格结构有关.
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