本文综述了近年来纳米多层膜界面微结构及超硬效应的研究进展, 表明纳米多层膜硬化的主要机制和位错的运动相关, 晶格错配引起的交变应变场对硬化起次要作用, 模量差异致硬起主要作
用. 指出了超硬纳米多层膜研究所存在的问题以及未来的发展方向.
The study of the hardening mechanism for the nano-multilayer films is the foundation for the preparation of those films. Several different models were proposed to interpret the super-hard effect in the nano-multilayer films, though they cannot interpret all the phenomena in those films. The progress of the research on the superhardness effect in the nano-multilayer films was reviewed.
It shows that all the mechanisms are related to the movement of the dislocation. The difference of the elastic modulus between the two materials plays the important role for the superhadness effect in the nano-multilayer films, while the alternated strain field plays the less important role. The developmental directions and the problems for the nano-multilayer films were also discussed.
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