采用射频磁控反应溅射法在蓝宝石衬底上制备了SiO2薄膜, 测试了镀膜前后蓝宝石试样的红外透过率, 测试并分析了镀膜与未镀膜蓝宝石试样在高温及雨蚀后的红外透过性能. 结果表明, 蓝宝石衬底上镀SiO2膜后红外透过率明显提高; 在高温下, SiO2薄膜依然具有很好的增透作用, 镀膜蓝宝石试样的平均透过率明显高于未镀膜蓝宝石试样的平均透过率; 雨蚀测试后, 镀膜蓝宝石试样的平均透过率损失很小, 镀膜蓝宝石的红外透过率明显高于未镀膜蓝宝石的红外透过率.
Improving the infrared transmission of sapphire can increase the reliability and accuracy of infrared detector. SiO2 coatings were prepared on sapphires by radio frequency magnetron reactive sputtering. Infrared transmissions of coated and uncoated sapphires at high temperatures and after rain erosion tests were investigated. Results show that the prepared SiO2 films can increase the transmission of sapphire in mid-wave IR greatly. At high temperatures, SiO2 films have an anti-reflective effect on sapphire substrates and so the coated sapphires have a higher average transmittance than the uncoated ones. After rain erosion tests, average transmission decreases a little in the wavelength range from 3 to 5μm for coated sapphires. In addition, sapphires coated with SiO2 films have a higher transmittance than uncoated ones after rain erosion.
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