采用冷心放肩微量提拉法(SAPMAC法)生长的蓝宝石晶体, 气孔是其主要缺陷. 本文探讨了影响气孔形成的工艺因素, 从晶体生长动力学角度分析了气孔形成机理. 结果表明, 通过优化温场、选择合适的生长速度及控制微凸固/液界面形状, 可有效降低晶体中气孔的数量.
Sapphire single crystal was grown by micro-pulling and shoulder at cooled center (SAPMAC) technique and the air bubbles were observed as one of the main defects in the as-grown crystals. Based on the growth parameters, the formation mechanism of the bubbles was discussed in the view of the crystal growth kinetics. It suggests that optimizing the temperature distribution in the furnace, selecting a suitable growth velocity and adopting a slightly convex interface to the melt can effectively reduce the quantity of bubbles.
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