采用非平衡磁控溅射法制备金红石相TiO2薄膜, 并用氢等离子体对TiO2薄膜进行了表面改性. XRD结果表明, 改性薄膜的结构并没有发生变化, FTIR检测薄膜中没有发现明显的-OH基团. XPS分析表明, 氢还原后薄膜次表面出现了氧缺位. 浸润性实验结果表明, 氢还原TiO2薄膜的亲水性有轻微的减弱. 血小板黏附实验发现, 在还原温度较低、时间较短(110℃、15min)时, TiO2薄膜的血液相容性得到明显改善, 这与氧缺位的量有关, 适量的氧缺位能改善TiO2薄膜的血液相容性.
Rutile titanium oxide films on silicon substrate were prepared by unbalanced reactive pulsed magnetron sputtering and subsequently modified by hydrogen plasma reduction. The XRD patterns show that the modified titanium oxide films consist of single rutile phase, which is similar to as-deposited films. FTIR results exhibit that no obvious -OH groups exist in the films. XPS spectra display that oxygen deficiency exist in the film after hydrogen plasma reduction. The wettability experiment show that the hydrophilicity of the hydrogen plasma modified Ti-O films decreases slightly. The anticoagulation property of Ti-O films modified at lower temperature in short time (110℃, 15min) is obviously improved, which is related to the content of oxygen deficiency. Consequently hydrogen introducing is an effective way to improve the anticoagulation property of titanium oxide films.
参考文献
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