热处理是AlN陶瓷调整结构、改善性能的有效手段.利用国产六面顶压机,在5.0GPa高压条件下,对高压烧结制备的AlN(Y2O3)陶瓷进行了热处理,研究了高压热处理对AlN陶瓷显微结构及导热性能的影响.结果表明:经5.0GPa/970℃/2h高压热处理后的AlN陶瓷材料与未热处理的试样相比,晶粒尺寸显著增大,晶粒形状越发规整,第二相均位于晶界处或者三角晶界区域,热导率达到了173.2W/(m·K),是未经过热处理试样的2.2倍.但是,将高压热处理时间延长到4h,AlN陶瓷的气孔增大,出现了反致密化现象,热导率也降低到80.9 W/(m·K).
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