用射频溅射法制各了(Fe88Zr7B5)0.96Cu0.04非晶软磁合金薄膜.研究了不同退火条件对其巨磁阻抗(GMI)效应的影响.该样品在自然退火和电流退火热处理后,纵向GMI比下降,并随退火电流的增加而增加,在电流为800mA时达到最大值17%磁场灵敏度相对于未退火样品的4%(kA/m)-1有所提高,达到7%(kA/m)-1.(Fe88Zr7B5)0.96Cu0.04薄膜经不同温度下纵向磁场退火处理后,样品的纵向和横向GMI比均有所提高,在2500℃最大的GMI比,13MHz时,最大纵向磁阻抗比达到17.5%,表现为单峰;横向磁阻抗比曲线变为双峰结构,在±0.4kA/m的磁场下,出现峰值为17.8%.
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