以甲基三氯硅烷和乙炔为源气体,用直流电热三级化学气相沉积法制备了带有碳涂层的钨芯SiC纤维,利用扫描电子显微镜、激光拉曼光谱仪和透射电子显微镜等方法观察了纤维的微观组织结构.结果表明,所制备的SiC纤维由钨芯、W/SiC界面反应层、两层SiC和表面碳涂层组成.纤维中的SiC主要为β-SiC,而且有明显的<111>择优取向,沉积过程中出现的Si共沉积等缺陷,导致其晶格紊乱.拉曼光谱分析表明,乙炔裂解得到的表面碳涂层由无定型碳和石墨组成.
参考文献
| [1] | 杨延清,朱艳,陈彦,等(YANG Yan -Qing,et al).SiC纤维增强Ti基复合材料的制备及性能.稀有金属材料与工程(Rare Metal Mat.Eng.),2002,31(3):201-204. |
| [2] | Preuss M,Rauchs G,Whithers P J,et al.Interfacial shear strength of Ti/SiC fibre composites measured by synchrotron main measurement.Composites,A,2002,33(10):1381-1385. |
| [3] | Luo X,Yang Y Q,Liu C X,et al.The fabrication and property of SiC fiber reinforced copper matrix composites.Mater.Sci.Eng.A,2007,459(1/2):244-250. |
| [4] | Sing X J,Pirouz P.The microstructuture of SCS-6 SiC fiber.J.Mater.Res.,1991,6(10):2234-2248. |
| [5] | Chollon G,Naslain R,Prentice C,et al.High temperature properties of SiC and diamond CVD-monofilaments.Journal of the European Ceramic Society,2005,25(11):1929-1942. |
| [6] | Cheng T T,Jones I P,Shatwell R A,et al.The microstructure of sigma ll40+ SiC fibres.Mater.Sci.Eng.A,1999,260(1):139-145. |
| [7] | 石南林,刘清民,常新春,等(SHI Nan-Lin,et al).SiC纤维的强度与表面微观形貌.金属学报(Acta Metall.Sin.),1990,26(3):B225-228. |
| [8] | 杨延清,文琼,马志军,等.SiC/Ti-6Al-4V复合材料界面反应的扫描电镜分析.稀有金属快报,2004,23(7):22-25. |
| [9] | 蔡杉,李占一,董妍,等.SiC纤维直流电阻加热CVD工艺研究.材料工程,2005(10):47-51. |
| [10] | Liu R J,Zhang C R,Zhou X G,et al.Structural analysis of chemical vapor deposited β-SiC coatings from CH3SiCl3-H2 gas precursot.J.Crystal Growth,2004,270(1/2):124-127. |
| [11] | Radmilovic V,Dahmen U,Gao D,et al.Formation of《111》fiber texture in β-SiC films deposited on si(100)substrate.Diamond Relat.Mater.,2007,16(1):74-80. |
| [12] | Chollon G,Vallerot J M,Helary D,et al.Structural and textural changes of CVD-SiC to indentation,high temperature creep and irradiation.Journal of the European Ceramic Society,2007,27(2/3):1503-1511. |
| [13] | Ward Y,Yong R J,Shatwell R A.Application of Raman microscopy to the analysis of silicon carbide monofilaments.J.Mater.Sci.,2004,39(22):6781-6790. |
| [14] | Ward Y,Yong R J,Shatwell R A.A microstructural study of silicon carbide fibers through the use of Raman microscopy.J.Mater.Sci,2001,36(1):55-56. |
| [15] | 刘金锋,刘忠良,王科范,等.Si(111)衬底上3C-SiC的固源MBE异质外延生长.真空科学与技术学报,2007,27(1):5-9. |
| [16] | Sone H,Kaneko T,Miyakawa N.In situ measurements and growth kinetics of silicon carbide chemical vapor deposition from methyltrichlorosiliane.J.Crystal Growth,2000,219(3):245-252. |
| [17] | Chollon G.Structural and textural analyses of SiC-based and carbon CVD coatings by Raman micro spectroscopy.Thin Solid Films,2007,516(2/3/4):388-396. |
| [18] | Sadezty A,Muckenhuber H,Grothe H,et al.Raman micro spectroscopy of soot and related carbonaceous materials:spectral amlysis and structural information.Carbon,2005,43(8):1731-1742. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%