采用射频磁控溅射方法在硅(100)衬底上制备了不同含量元素钕(Nd)掺杂的氧化锌薄膜.XRD分析表明,所有ZnO薄膜都具有c轴择优取向.随着Nd掺杂量的增加,(002)衍射峰的强度减弱,颗粒的尺寸变小.紫外-可见光谱分析表明,所有薄膜在可见光区的透过率超过85％,随着Nd掺杂量的增加,光学带隙从3.30 eV增加到3.40 eV.用XPS对薄膜的表面化学态进行表征,Nd元素在ZnO薄膜表面以Nd3+离子态存在.用接触角测试薄膜表面的浸润性,并计算其表面能.用血小板粘附实验研究不同含量Nd掺杂ZnO薄膜的血液相容性,其结果表明稀土钕掺杂后血小板的粘附数量和形变都较少,稀土掺杂和疏水性的提高是改善氧化锌薄膜抗凝血性能的主要原因.
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