电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

无机材料学报, 2012, 27(4): 375-378. doi: 10.3724/SP.J.1077.2012.00375

电感器用Ni-Cu-Zn铁氧体薄膜的设计与性能研究

范跃农 , 冯则坤 , 陈中艳 , 龚荣洲

(1. 华中科技大学电子科学与技术系, 武汉 430074

2. 2. 景德镇陶瓷学院机电系, 景德镇 333403)

(1. Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China

2. 2. Department of Mechanical and Electrical, Jingdezhen Ceramic Institute, Jingdezhen 333403, China)

基金项目: 高等学校博士学科点专项科研基金(20090142120003)

关键词：铁氧体薄膜; 电感量; 品质因数; 丝网印刷

Design and Performance of Ni-Cu-Zn Ferrite Film for Inductor

FAN Yue-Nong , FENG Ze-Kun , CHEN Zhong-Yan , GONG Rong-Zhou

Keywords： ferrite film; inductance; quality factor; screen printing

采用丝网印刷技术制备Ni-Cu-Zn铁氧体电感器薄膜, 并对其性能进行了表征. XRD分析表明, 铁氧体薄膜具有相同的晶格结构. 研究结果表明, 在引入了铁氧体薄膜后, 电感器的电感量相对于空心电感器有30%左右的提高, 品质因数依频率不同有所改善, 共振频率有所降低. 经400℃后处理的薄膜电感器在低频时性能最好, 50 MHz时电感量提高了27%, 品质因数提高了39%.

Ni-Cu-Zn ferrite inductor film was fabricated by screen print technology, and its performances were investigated. XRD results suggest that the as-prepared thin films exhibit the same crystalline structure. The results show that after introducing of ferrite film, the inductance increases by 30%, the quality factor is improved, and the resonance frequency decrease. Ferrite inductor thin films annealed at 400℃ exhibit a optimum performance with high quality at 50 MHz, inductance increased by 27%, the quality factor increased by 39%.

参考文献

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