设计了以融石英玻璃为基体的在三个特定波段有超高透过率的双层增透膜. 以正硅酸乙酯为前驱体, 盐酸、氨水为催化剂, 采用溶胶–凝胶法分别制备得到酸性SiO2溶胶和碱性SiO2溶胶, 将酸性SiO2溶胶和碱性SiO2溶胶按照一定比例混合得到复合溶胶, 复合溶胶按照一定比例配制可得到折射率在1.23~1.42之间的SiO2膜层. 通过聚氧化丙烯丙三醇醚对SiO2溶胶进行改性, 可制备折射率为1.17低折射率膜层. 以上述复合溶胶和改性溶胶为基础, 采用提拉镀膜法在融石英玻璃上成功镀制了具有不同折射率的SiO2双层薄膜. 实验结果表明: 这种双层增透膜在351、527、1053 nm处的透过率分别可以达到99.7%、99.1%、98.03%, 在饱和水汽条件下存放90 d后峰值透过率基本没有下降. 这种新型的具有宽频增透效果的双层增透膜在强激光领域具有重要的应用价值.
Double-layer wide spectrum antireflective (AR) coating with high transmittance simultaneously at 351 nm, 527 nm and 1053 nm was designed. Using tetraethyl orthosilicate (TEOS) as precursor and ammonia and hydrochloric acid as catalysts, the base-catalyzed and acid-catalyzed silica sols were prepared by the Sol-Gel process. By mixing acid-catalyzed and base-catalyzed silica sols together with different weight ratios, silica AR coatings with refractive index ranging from 1.23 to 1.44 were obtained. The top-layer with a low refractive index of 1.17 was prepared from PO modified silica sol. Double-layer silica AR coatings on fused silica substrates with acid- and base-catalyzed mixed silica AR coatings of different refractive indices as bottom layer were prepared by dip-coating process. It was found that double-layer wide spectrum AR coating possessed transmittance of 99.7%, 99.1% and 98.0% at 351 nm, 527 nm and 1053 nm, respectively. After being exposed to highly humid atmosphere for 90 d, transmittance loss of double-layer wide spectrum AR coating was less than 0.2%. This novel double-layer wide spectrum AR coating can be applied in high-powered fusion laser system.
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