通过溶胶-凝胶法制备纯的VO2和W掺杂的VO2薄膜,并且进行了XPS、AFM和XRD的分析与表征,并观察了其微观形貌和结构.同时研究了VO2和W掺杂VO2在红外光谱(λ=4μm)和THz(0.3～1.0 THz)区域的金属-绝缘转变性能.结果表明:室温下W掺杂的VO2薄膜在红外和THz区域的初始透过率都比纯的VO2薄膜低.在THz波段,W掺杂的VO2表现出更低的相变温度.同时在VO2和W掺杂VO2相变过程中,观察到了金属-绝缘转变和结构转变的现象,W掺杂VO2具有明显的峰位偏移现象.
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