利用金属有机物分解法(MOD)在Pt/Ti/SiO2/Si(111)衬底上制备了Bi3.15(EU0.7Nd0.15)Ti3O12 (BENT)薄膜,并经600℃、650℃、700℃、750℃退火处理.通过纳米压痕法测试了薄膜的硬度和弹性模量,采用X射线衍射(XRD)测量了薄膜的残余应力.BENT薄膜的晶粒尺寸随着退火温度的升高而不断变大.当晶粒尺寸从37 nm增大到46 nm时,薄膜的硬度值从8.4 GPa减少到3.1 GPa,弹性模量从171.5 GPa减小到141.6 GPa.随着退火温度从600℃升高到750℃时,薄膜的残余压应力值从-743 MPa减小到了-530 MPa.退火温度为600℃的BENT薄膜具有最大的硬度和弹性模量.
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