在TFT-IA2D的生产过程中,取向层表面针孔缺陷是造成产品不良的常见原因.应用聚焦离子束(FIB)、扫描电子显微镜(SEM)和光学测量系统(0MS)工具,并结合数据统计软件Business Objects(BO)对实际生产过程中的一种典型产品不良--黑点,进行了测试和分析.结果表明,取向层表面针孔缺陷是产生黑点不良的根本原因.在此基础上,进一步通过理论分析和实验研究证明,成膜过程中膜液的流体力学不稳定性是导致取向层表面针孑L缺陷的重要原因,而固化时间则是影响流体力学不稳定性的重要参数.膜液流体力学不稳定性的充分发展并最终对膜结构产生影响需要一定时间,当固化时间接近甚至小于不稳定性充分发展的时间时,取向层表面产生针孔缺陷的机会将大大减小甚至消除.
The pinholes on the surface of alignment layer was studied, which formed during the TFT-LCD manufacturing process and caused defects of the products. Herein, a vitally typical defect, black spot, was analyzed via FIB, SEM and ()MS. The analysis results of sta-tistical software BO (Business Objects) show that the pinhole is the main cause of the black spot. Based on theoretical analysis and further experimental results, it is found that the hy-drodynamic instability of the solution may lead to the pinholes on the alignment layer sur-face, and the pre-cure time of the alignment film solution is significantly responsible for hy-drodynamic instability. It is noteworthy that the instability needs times to grow full enough and then to influence the film structure. Therefore, the pinholes on the alignment layer sur-face will be reduced or eliminated if the pre-cure time is less than or equal to that time.
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